Effect of the Sapphire-Nitridation Level and Nucleation-Layer Enrichment with Aluminum on the Structural Properties of AlN Layers.

Autor:	Malin, T. V.1 mal-tv@isp.nsc.ru, Milakhin, D. S.1, Mansurov, V. G.1, Galitsyn, Yu. G.1, Kozhuhov, A. S.1, Ratnikov, V. V.2, Smirnov, A. N.2, Davydov, V. Yu.2, Zhuravlev, K. S.1,3
Zdroj:	Semiconductors. Jun2018, Vol. 52 Issue 6, p789-796. 8p.
Databáze:	Academic Search Ultimate
Externí odkaz:	Zobrazit plný text záznamu