Design and Testing of a Micro-thermal Sensor Probe for Nondestructive Detection of Defects on a Flat Surface.

Autor: Shimizu, Yuki1 yuki.shimizu@nano.mech.tohoku.ac.jp, Matsuno, Yuki1 mailmatsuno@nano.mech.tohoku.ac.jp, Chen, Yuan-Liu1 yuanliuchen@nano.mech.tohoku.ac.jp, Matsukuma, Hiraku1, Gao, Wei1 gaowei@cc.mech.tohoku.ac.jp
Zdroj: Nanomanufacturing & Metrology. Mar2018, Vol. 1 Issue 1, p45-57. 13p.
Databáze: Academic Search Ultimate
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