Properties of Gallium Oxide Films Obtained by HF-Magnetron Sputtering.
| Autor: | Lygdenova, T. Z.1 tuyna-ligdenova@yandex.ru, Kalygina, V. M.1 kalygina@ngs.ru, Novikov, V. A.1 novikovva@mail.tsu.ru, Prudaev, I. A.1 funcelab@gmail.com, Tolbanov, O. P.1 top@mail.tsu.ru, Tyazhev, A. V.1 antontyazhev@mail.ru |
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| Zdroj: | Russian Physics Journal. Mar2018, Vol. 60 Issue 11, p1911-1916. 6p. |
| Databáze: | Academic Search Ultimate |
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