AN EFFICIENT MICROELECTROMECHANICAL SYSTEM BASED ON COMBUSTION OF NANOPOROUS SILICON.
| Autor: | DOLBIK, A. V.1 a_dolbik@mail.ru, LABUNOV, V. A.1, VYSOTSKII, V. B.2 |
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| Zdroj: | Physics, Chemistry & Applications of Nanostructures - Proceedings of the International Conference Nanomeeting ¨C 201. 2013, p611-613. 3p. |
| Databáze: | Academic Search Ultimate |
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