Plasma under control: Advanced solutions and perspectives for plasma flux management in material treatment and nanosynthesis.

Autor: Baranov, O.1, Bazaka, K.2, Kersten, H.3, Keidar, M.4, Cvelbar, U.5, Xu, S.6, Levchenko, I.2,6
Zdroj: Applied Physics Reviews. 2017, Vol. 4 Issue 4, p1-33. 33p.
Databáze: Academic Search Ultimate