FABRICATION OF A REFLECTING MEMS-ELEMENT BASED ON A THERMAL MICROMECHANICAL ACTUATOR.
| Autor: | Evstafev, Sergei1, Timoshenkov, Sergey1, Samoilykov, Vyacheslav1, Korobova, Natalia1 |
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| Zdroj: | Proceedings of the International Multidisciplinary Scientific GeoConference SGEM. 2017, Vol. 17 Issue 6-2, p133-140. 8p. |
| Databáze: | Academic Search Ultimate |
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