Scanning near-field lithography with high precision flexure orientation stage control.
| Autor: | Qin, Jin1, Zhang, Liang1, Tan, Haosen1, Wang, Liang1 Lwang121@ustc.edu.cn |
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| Zdroj: | Applied Physics A: Materials Science & Processing. Sep2017, Vol. 123 Issue 9, p1-7. 7p. 2 Color Photographs, 3 Diagrams, 2 Graphs. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
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