Rapid Wafer-Scale Growth of Polycrystalline 2H-MoS2 by Pulsed Metal-Organic Chemical Vapor Deposition.
| Autor: | Kalanyan, Berc1 berc.kalanyan@nist.gov, Kimes, William A.1, Beams, Ryan1, Stranick, Stephan J.1, Garratt, Elias1, Kalish, Irina1, Davydov, Albert V.1, Kanjolia, Ravindra K.2, Maslar, James E.1 |
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| Zdroj: | Chemistry of Materials. Aug2017, Vol. 29 Issue 15, p6279-6288. 10p. |
| Databáze: | Academic Search Ultimate |
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