Microstructural study of He-implanted and thermally annealed silicon-on-sapphire layers.
| Autor: | Chesnokova, Yu.1, Aleksandrova, P.1, Belova, N.1, Shemardov, S.1, Vasiliev, A. a.vasiliev56@gmail.com |
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| Zdroj: | Crystallography Reports. Jul2017, Vol. 62 Issue 4, p597-601. 5p. |
| Databáze: | Academic Search Ultimate |
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