On the detachment of thin ITO films from silicon substrate by microsecond laser irradiation.
Autor: | Kirienko, D.1, Berezina, O.1 kirienko@petrsu.ru |
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Zdroj: | Semiconductors. Jun2017, Vol. 51 Issue 6, p823-827. 5p. |
Databáze: | Academic Search Ultimate |
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