Accurate Simulation of Parametrically Excited Micromirrors via Direct Computation of the Electrostatic Stiffness.
| Autor: | Frangi, Attilio1 attilio.frangi@polimi.it, Guerrieri, Andrea1 andrea.guerrieri@polimi.it, Boni, Nicoló2 nicolo.boni@st.com |
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| Zdroj: | Sensors (14248220). Apr2017, Vol. 17 Issue 4, p779. 11p. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
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