Evaluation of Friction Coefficient and Adhesion Properties of Silicon Carbon Nitride Films Prepared by HWCVD.
| Autor: | YAMADA, T.1,2, ISEDA, T.1, KADOTANI, Y.3, IZUMI, A.1,3 izumi@ele.kyutech.ac.jp |
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| Zdroj: | Acta Physica Polonica: A. 2017, Vol. 131 Issue 3, p463-466. 4p. |
| Databáze: | Academic Search Ultimate |
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