Comb Drive Designs With Minimized Levitation.

Autor:	del Corro, Pablo G.1, Imboden, Matthias2, Bishop, David J.3, Pastoriza, Hernan1
Zdroj:	Journal of Microelectromechanical Systems. Dec2016, Vol. 25 Issue 6, p1025-1032. 8p.
Databáze:	Academic Search Ultimate
Externí odkaz:	Zobrazit plný text záznamu