Multi-frequency AOM for multi-beam laser scanning exposure system.
Autor: | Shinada, Hidetoshi1 shinada_hidetoshi@cyberdyne.jp |
---|---|
Zdroj: | Optical Review. Oct2016, Vol. 23 Issue 5, p765-769. 5p. |
Databáze: | Academic Search Ultimate |
Externí odkaz: |
Autor: | Shinada, Hidetoshi1 shinada_hidetoshi@cyberdyne.jp |
---|---|
Zdroj: | Optical Review. Oct2016, Vol. 23 Issue 5, p765-769. 5p. |
Databáze: | Academic Search Ultimate |
Externí odkaz: |