Dynamic characteristics of voltage induced reciprocated bending in double cantilever configuration of asymmetric comb drive MEMS.
| Autor: | Mukherjee, Banibrata1 baniju@gmail.com, Swamy, K.2, Sen, Siddhartha1 |
|---|---|
| Zdroj: | Microsystem Technologies. May2016, Vol. 22 Issue 5, p1089-1103. 15p. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
|
Full text from SpringerLink