Plasma-chemical synthesis of transparent dielectric Si-C-O-H films from trimethylphenoxysilane.
| Autor: | Ermakova, E.1 ermakova@niic.nsc.ru, Rumyantsev, Yu.1, Rakhlin, V.2, Kosinova, M.1 |
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| Zdroj: | High Energy Chemistry. May2016, Vol. 50 Issue 3, p224-227. 4p. |
| Databáze: | Academic Search Ultimate |
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