Automated method for determining the etch pits density on crystallographic planes of large semiconductor crystals.
| Autor: | Pekar, G. S.1 pekar@isp.kiev.ua, Singaevsky, A. A.1 511alexsin@gmail.com, Singaevsky, A. F.1 |
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| Zdroj: | Semiconductor Physics, Quantum Electronics & Optoelectronics. 2016, Vol. 19 Issue 1, p23-27. 5p. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
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