Spatial distribution of the electron component parameters in the nitrogen plasma of a low-pressure electrode microwave Discharge.

Autor: Lebedev, Yu.1 lebedev@ips.ac.ru, Krashevskaya, G. krashevskaya-gv@mail.ru, Gogoleva, M.1 masha_g@list.ru
Zdroj: Plasma Physics Reports. Jan2016, Vol. 42 Issue 1, p100-103. 4p.
Databáze: Academic Search Ultimate