Hybrid micro electrostatic actuator.
| Autor: | Hailu, Zewdu1 zhailu@ryerson.ca, He, Siyuan1 s2he@ryerson.ca, Ben Mrad, Ridha2 rbenmrad@mie.utoronto.ca |
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| Zdroj: | Microsystem Technologies. Feb2016, Vol. 22 Issue 2, p319-327. 9p. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
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