Effects of residual hydrogen in sputtering atmosphere on structures and properties of amorphous In-Ga-Zn-O thin films.
| Autor: | Haochun Tang1, Kyohei Ishikawa1, Keisuke Ide1, Hidenori Hiramatsu1,2, Shigenori Ueda3, Naoki Ohashi2,3, Hideya Kumomi2, Hideo Hosono1,2, Toshio Kamiya1,2 kamiya.t.aa@m.titech.ac.jp |
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| Zdroj: | Journal of Applied Physics. 2015, Vol. 118 Issue 20, p205703-1-205703-6. 6p. 1 Chart, 7 Graphs. |
| Databáze: | Academic Search Ultimate |
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