Fabrication of Solid State Nanopore in Thin Silicon Membrane Using Low Cost Multistep Chemical Etching.

Autor: Khan, Muhammad Shuja1 msk0003@uah.edu, Williams, John Dalton1 john.williams@uah.edu
Zdroj: Materials (1996-1944). 2015, Vol. 8 Issue 11, p7389-7400. 12p. 3 Black and White Photographs, 2 Diagrams, 1 Chart, 2 Graphs.
Databáze: Academic Search Ultimate