Fabrication of Solid State Nanopore in Thin Silicon Membrane Using Low Cost Multistep Chemical Etching.
Autor: | Khan, Muhammad Shuja1 msk0003@uah.edu, Williams, John Dalton1 john.williams@uah.edu |
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Zdroj: | Materials (1996-1944). 2015, Vol. 8 Issue 11, p7389-7400. 12p. 3 Black and White Photographs, 2 Diagrams, 1 Chart, 2 Graphs. |
Databáze: | Academic Search Ultimate |
Externí odkaz: |