The effect of Al target current on the structure and properties of (NbAl)N films with an amorphous AlN phase.
| Autor: | Ivashchenko, V.1, Pogrebnjak, A.2 alexp@i.ua, Sobol', O.3, Rogoz, V.2, Meilekhov, A.3, Dub, S.4, Kupchishin, A.5 |
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| Zdroj: | Technical Physics Letters. Jul2015, Vol. 41 Issue 7, p697-700. 4p. |
| Databáze: | Academic Search Ultimate |
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