Laser plasmochemical synthesis of hard protective SiCN films.

Autor:	Demin, V. N.1 (AUTHOR) demin@niic.nsc.ru, Smirnova, T. P.1 (AUTHOR), Borisov, V. O.1 (AUTHOR), Grachev, G. N.2 (AUTHOR), Smirnov, A. L.2 (AUTHOR), Khomyakov, M. N.2 (AUTHOR)
Zdroj:	Surface Engineering. Aug2015, Vol. 31 Issue 8, p628-633. 6p.
Databáze:	Academic Search Ultimate
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