Transmission electron microscopy studies of atomic layer deposition TiO2 films grown on silicon
| Autor: | Mitchell, D.R.G. drm@ansto.gov.au, Attard, D.J.1, Triani, G.1 |
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| Zdroj: | Thin Solid Films. Sep2003, Vol. 441 Issue 1/2, p85. 11p. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
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