Formation of Silicon (Si) Grains in AlN Thin Layer Grown on an Si(1 1 1) Substrate: Effect of Deposition Sequence#.
| Autor: | Kim, Young Heon1,2, Ahn, Sang Jung1,2, Lee, Sang Tae3, Kim, Moondeock3, Oh, Jae Eung4 |
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| Zdroj: | Bulletin of the Korean Chemical Society. Mar2015, Vol. 36 Issue 3, p1008-1012. 5p. |
| Databáze: | Academic Search Ultimate |
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