High throughput sub-10 nm metallic particles organization on templates made by block copolymer self-assembly and nanoimprint.

Autor:	Arias-Zapata, Javier1, Cordeiro, Julien1, Böhme, Sophie1, Girardot, Cécile1, Garnier, Jérôme1, Bézard, Philippe1, Ntetsikas, Konstantinos2, Liontos, George2, Avgeropoulos, Apostolos2, Peyrade, David1, Zelsmann, Marc1 marc.zelsmann@cea.fr
Zdroj:	Microelectronic Engineering. Jun2015, Vol. 141, p155-159. 5p.
Databáze:	Academic Search Ultimate
Externí odkaz:	Zobrazit plný text záznamu Full Text from ScienceDirect