OVERVIEW ON MAGNETRON SPUTTERED TANTALUM OXYNITRIDE THIN FILMS – STRUCTURES AND PROPERTIES.
| Autor: | Cristea, D.1 daniel.cristea@unitbv.ro, Cunha, L.2, Crișan, A.1, Munteanu, D.1 |
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| Zdroj: | TEHNOMUS. 2015, p185-190. 6p. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
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