Effect of Si additions on thermal stability and the phase transition sequence of sputtered amorphous alumina thin films.
| Autor: | Bolvardi, H.1, Baben, M. to1, Nahif, F.1, Music, D.1 music@mch.rwth-aachen.de, Schnabel, V.1, Shaha, K. P.1, Mráz, S.1, Bednarcik, J.2, Michalikova, J.2, Schneider, J. M.1 |
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| Zdroj: | Journal of Applied Physics. 1/14/2015, Vol. 117 Issue 2, p025302-1-025302-7. 7p. 1 Diagram, 2 Charts, 8 Graphs. |
| Databáze: | Academic Search Ultimate |
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