Influence of hydrogen dilution on low-temperature polycrystalline silicon formation using RF excitation SiH[4]/H[2] plasma.

Autor:	Yao Ruohe, Lin Xuanying, Wu Pin, Yu Chuying, Shi Wangzhou, Lin Kuixun
Předmět:	*Hydrogen Dilution Silicon Polycrystals
Zdroj:	Solar Energy Materials & Solar Cells. 4/15/2000, Vol. 62 Issue 1/2, p187. 6p.
Abstrakt:	Studies the effect of hydrogen dilution on polycrystalline silicon formation. Technique used for the study; Reduction of growth rate of a-silicon/hydrogen films through the process; Decrease in dark conductivity of the poly-silicon film with an increase in hydrogen dilution.
Databáze:	GreenFILE
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