Wafer-level packaged MEMS switch with TSV

Autor:	Lietaer, Nicolas, Bakke, Thor, Summanwar, Anand, Dalsjø, Per G., Gakkestad, Jakob, Niklaus, Frank
Databáze:	NORA (Norwegian Open Research Archive)
Externí odkaz:	http://hdl.handle.net/11250/2431338 Zobrazit plný text záznamu