The Study and Fabrication of Sputtered TiO2 Based Ultraviolet Detectors
| Autor: | Yi-Hua Chang, 張義驊 |
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| Rok vydání: | 2015 |
| Druh dokumentu: | 學位論文 ; thesis |
| Popis: | 103 TiO2 is one of the most widely studied and important materials for scientific applications. In this thesis, the goal of this study is utilizing titanium dioxide to fabricate UV detectors on quartz substrate by RF-sputtering system. Our report has two subjects in this study. First, TiO2 thin films with thickness of 100 nm under various annealing temperatures (400 ℃, 500 ℃, 600 ℃, 700 ℃) using furnace tube was to analyze the structure of films. Second, we monitored the TiO2 films in different atmosphere (Air, Ar, N2) annealing by furnace tube, then fabricated metal-semiconductor-metal ultraviolet photo-detectors, and utilize the measurement system to analyze the data. The experiment was be designated as a voltage of 10V, to observe the TiO2 ultraviolet detectors annealing in a variety of atmospheres. It is found that the device under an Ar atmosphere annealing with 600℃ has a maximum ratio of photo to dark current was 4×104 and a maximum response of 2.187×10-2 A/W at 320 nm illumination. Therefore, we successfully obtained the TiO2 ultraviolet detectors in Argon atmosphere annealing at 600 ℃ for the final optimal parameter. |
| Databáze: | Networked Digital Library of Theses & Dissertations |
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