Optical System Alignment By Double Zernike Polynomial
Autor: | Wei Tseng, 曾蔚 |
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Rok vydání: | 2012 |
Druh dokumentu: | 學位論文 ; thesis |
Popis: | 100 This thesis discusses the development of an optical alignment test system. This system utilizes coefficients of a Double Zernike Polynomial, which contains aberration information of both field and pupil, to quantify alignment errors in an optical system. This test system increases measurement efficiency, and thus will be greatly useful in optical shop testing. An optical system was first simulated to have certain alignment errors. The corresponding incurred changes in the Double Zernike coefficients were determined from the Double Zernike Table. These varied coefficients will be used to determine alignment errors in other optical systems. Next an experimental setup was built for verification. This setup provides high-resolution-images and multi field information. An algorithm was then used to perform Double Zernike polynomial fitting. This system acquires off-axis information in a single capture, thus it provides a much shorter processing time compared to many other optical measurement systems. Future work should be focused on improving the resolution and the accuracy of the system. This will increase the measurement accuracy. |
Databáze: | Networked Digital Library of Theses & Dissertations |
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