Growth of Indium Tin Oxide Nanostructures through a Magnetron Sputtering System: Application to Crystalline Si Solar Cells
| Autor: | Chih-Yang Lee, 李智揚 |
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| Rok vydání: | 2011 |
| Druh dokumentu: | 學位論文 ; thesis |
| Popis: | 99 In this thesis, we tried to sputter indium tin oxide (ITO) on high-temperature substrates (300~450oC), and found that good qualities of electrical conductivity and optical transparency were achieved. Moreover, we discovered that large area ITO nanowires were successfully formed at high substrate temperatures due to self-catalytic growth mechanism. We confirmed that the ITO nanowires were grown through the vapor-liquid-solid (VLS) growth mechanism. Our experiments show that the best ITO thin film process conditions are 10 watts of sputtering power, 370oC of substrate temperature, and 60 minutes of growth time, under which condition the sheet resistance gives 10.45 ohm/□, and the transmittance in the visible range gives 84%(at a wavelength of 600 nm). Further, the grown ITO thin films and nanowires were used as the top electrodes for crystalline silicon solar cells. According to our experiments, the conversion efficiency increased from 3.25% to 6.44%, when the gold finger electrode of a planar Si crystalline solar cell was replaced by the ITO thin film electrode. Nevertheless, it is believed that the rich interface states between the ITO and the Si surface could lead to increased surface recombination rates. In the future, there is still plenty of room for further optimization of the processes, considering how to address the interface issue. |
| Databáze: | Networked Digital Library of Theses & Dissertations |
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