Application of Micro/Nano Structure on Si-substrate to Enhance the Efficiency of solar cell
| Autor: | You-Chen Weng, 翁祐晨 |
|---|---|
| Rok vydání: | 2011 |
| Druh dokumentu: | 學位論文 ; thesis |
| Popis: | 99 How to enhance the efficiency of solar cell is the most important issue in photovoltaic system. There are three major points to increase the efficiency of current Si-substrate solar cell such as (1) to reduce the recombination process, (2) to increase area for light absorption, and (3) to reduce reflection of solar cell. In this study, we use a Innovative nano-lithography process to texture orderly micro-structure for reduce reflection and to enhance the efficiency of solar cell. The nano-lithography using blue laser direct writing on photoresist accompanied by dry etching system have been used to texture orderly micro-structure. In ICP-RIE (Inductively Coupled Plasma Reactive Ion Etching) dry etching process, different etching morphology on silicon solar cell is adjusted by the proportion between SF6 and O2. The reflectance spectrum and efficiency of silicon solar cell with orderly microstructure have been measured to analyze the characteristics. For a orderly micro-structure with pit size 5μm, the reflectance spectroscopy in UV range and IR range can reduce 50% and 70% respectively. It is a good result that the orderly micro-structure can effectively improve the anti-reflection of Si-substrate. But the efficiency of orderly micro-structure solar sell only 15.7%. However, if we design a orderly micro-structure with pit size 2μm, the fficiency of the solsr cell can reach 18%. This shows that different micro-/nano- structure on Si-substrate may affect the efficiency of the solar cell. The future work will make sub-micro/nano- orderly structure of silicon solar cell to enhance efficiency of silicon solar cell. |
| Databáze: | Networked Digital Library of Theses & Dissertations |
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