Investigation of GaN-Based Hydrogen Sensors with Porous Sensing Metal and Nanoparticles
| Autor: | Kun-Chieh Liang, 梁昆傑 |
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| Rok vydání: | 2009 |
| Druh dokumentu: | 學位論文 ; thesis |
| Popis: | 97 In this thesis, a series of high-performance GaN based Schottky metal-semiconductor-metal hydrogen sensors, including fundamental Pd sensor, mixture-type sensor, and nano-scale-type sensor are fabricated and studied. Pd is employed as sensing metal due to its excellent catalytic activity towards hydrogen gases. GaN is served as sensing platforms because of its larger bandgap than that of Si-based materials. The sensing responses, EBH (effective barrier height) variations, sensing voltage variations, and transient responses of these sensors measured under different hydrogen concentrations have also been presented. The studied fundamental MSM Pd sensor exhibits some merits on good sensing response (~175), symmetrical sensing characteristics, short dynamic response time, nice stability, and widespread voltage regime. In order to ameliorate the sensing performances of the fundamental Pd sensor in low-concentration |
| Databáze: | Networked Digital Library of Theses & Dissertations |
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