The Research of Serial bideposition of anisotropic thin film at DUV
| Autor: | Chih-Jung Chiang, 江直融 |
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| Rok vydání: | 2007 |
| Druh dokumentu: | 學位論文 ; thesis |
| Popis: | 95 In this study we focused primarily on magnesium fluoride and lanthanum fluoride that promise a transparency at DUV wavelengths. We used 70° as the deposition angle and rotated the substrate stepwise by half a turn to form chevron structures by a single electron-beam source. We changed the rotation times in a specific thickness to investigate the changes in structure, stress, absorption band of water, surface roughness and linear birefringence. Structures were observed by scanning electron microscopy (SEM) photographs of deposition-plane fractures. Stress was measured by Phase-Shifting Interferometer. We use the Fourier Transform Infrared (FTIR) Spectroscopy to observe the absorption band of water of thin films. Surface Roughness was measured by atomic force microscopy (AFM). The Refractive indices in two different directions were determined from spectrometer equipped with a polarizer. We show that the linear birefringence would increase and the stress would decrease when the rotation times were increased. |
| Databáze: | Networked Digital Library of Theses & Dissertations |
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