Experimental study of sulfur hexafluoride (SF6) dispersion inside a cleanroom
| Autor: | Hui-Ya Shih, 施惠雅 |
|---|---|
| Rok vydání: | 2007 |
| Druh dokumentu: | 學位論文 ; thesis |
| Popis: | 95 Sulfur hexafluoride (SF6) of 99.9% was intentionally released as an emission source inside a manufacturing cleanroom to study the contaminating gas dispersion pattern during preventive maintenance processes. To measure the SF6 concentration profiles, three movable Fourier transform infrared spectrometers (FTIRs) were simultaneously used. In addition, to determine if cross-contamination of different working zones occurred, an open-path FTIR was also used to monitor the SF6 concentrations before the recirculation air of the fab. The results show that the dilution factor of the cleanroom circulation air is more than 105, and that cross-contamination situation occurs in some isolated areas. The data of this study are useful for a manufacturing fab to develop the airborne molecular contamination (AMC) strategies and to locate the gas sensor installation positions. |
| Databáze: | Networked Digital Library of Theses & Dissertations |
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