High Fequency Micromechanical Bandpass Filters
| Autor: | ming-chao chiang, 江銘昭 |
|---|---|
| Rok vydání: | 2007 |
| Druh dokumentu: | 學位論文 ; thesis |
| Popis: | 95 This study investigates the fabrication of high frequency (HF) micromechanical bandpass filter using the standard 0.35μm CMOS process. The filter is actuated by an electrostatic force. The structure of the filter comprises driving electrode, sensing electrode, suspended springs and a suspended membrane. The electrodes and the membrane are the metal layers manufactured by the CMOS process. Light weight of the mass and enhancing spring stiffness of this mechanical structure give the response in HF range. Two filters arranged in series leads to a micromechanical bandpass filter. In this study, using simple post-process, requiring only a wet etching silicon dioxide layer, can levitate the microstructure. Simulation results show that the center frequency of the bandpass filter is 39.8 MHz. Experimental results show that the center frequency is 39.6 MHz with an error 0.2MHz. The 20dB shape factor is as low as 1.21, and a bandwidth of 330 kHz is achieved. For a single filter, the center frequency is 39.5MHz, the 20dB shape factor is 2.8, and a bandwidth is 49 kHz,respectively. |
| Databáze: | Networked Digital Library of Theses & Dissertations |
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