Ion-surface interactions and limits to silicon epitaxy at low temperatures

Autor:	Murty, M. V. Ramana. Atwater, Harry Albert
Jazyk:	angličtina
Rok vydání:	1995
Zdroj:	Ion-surface interactions and limits to silicon epitaxy at low temperatures [electronic thesis]
Druh dokumentu:	Electronic dissertations.
Popis:	Thesis (Ph. D.). UM #95-09,981. Includes bibliographical references.
Databáze:	Networked Digital Library of Theses & Dissertations
Externí odkaz:	http://resolver.caltech.edu/CaltechETD:etd-10262007-111208 Zobrazit plný text záznamu