Multiscale computational fluid dynamics modeling of an area-selective atomic layer deposition process using a discrete feed method
| Autor: | Wang, Henrik, Tom, Matthew, Ou, Feiyang, Orkoulas, Gerassimos, Christofides, Panagiotis D. |
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| Zdroj: | In Digital Chemical Engineering March 2024 10 |
| Databáze: | ScienceDirect |
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