Anisotropic and low damage III-V/Ge heterostructure etching for multijunction solar cell fabrication with passivated sidewalls
| Autor: | de Lafontaine, Mathieu, Pargon, Erwine, Gay, Guillaume, Petit-Etienne, Camille, David, Sylvain, Barnes, Jean-Paul, Rochat, Névine, Jaouad, Abdelatif, Volatier, Maïté, Fafard, Simon, Aimez, Vincent, Darnon, Maxime |
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| Zdroj: | In Micro and Nano Engineering June 2021 11 |
| Databáze: | ScienceDirect |
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