Nanometer – Thick titanium film as a silicon migration barrier

Autor: Fawaeer, Saleh H., Al-Qaisi, Wala’ M., Sedláková, Vlasta, Mousa, Marwan S., Knápek, Alexandr, Trunec, Martin, Sobola, Dinara
Zdroj: In Materials Today Communications August 2024 40
Databáze: ScienceDirect