Nanometer – Thick titanium film as a silicon migration barrier
| Autor: | Fawaeer, Saleh H. a, ⁎, Al-Qaisi, Wala’ M. a, Sedláková, Vlasta b, Mousa, Marwan S. c, Knápek, Alexandr d, Trunec, Martin a, e, Sobola, Dinara a, f |
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| Zdroj: | In Materials Today Communications August 2024 40 |
| Databáze: | ScienceDirect |
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