Laser drilling of micro-holes in single crystal silicon, indium phosphide and indium antimonide using a continuous wave (CW) 1070 nm fibre laser with millisecond pulse widths
| Autor: | Maclean, Jessica O., Tangkijcharoenchai, C., Coomber, Stuart, Voisey, Katy T. |
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| Zdroj: | In Procedia CIRP 2018 74:407-412 |
| Databáze: | ScienceDirect |
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