Self-Aligned Process for the Development of Surface Stress Capacitive Biosensor Arrays
| Autor: | Tsouti, Vasiliki, Filippidou, Myrto, Boutopoulos, Christos, Broutas, Panagiotis, Zergioti, Ioanna, Chatzandroulis, Stavros |
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| Zdroj: | In Procedia Engineering 2011 25:835-838 |
| Databáze: | ScienceDirect |
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