Improvement of Heat and Mass Transfer Performance in a Polysilicon Chemical Vapor Deposition Reactor with Field Synergy Principle
Autor: | An, L.S., Yang, Zh, Zhong, G.Y., Liu, Y.W. |
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Zdroj: | In Energy Procedia May 2017 105:688-693 |
Databáze: | ScienceDirect |
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