Annealing effects on PECVD-grown Si rich [formula omitted] thin films
Autor: | Esposito, Emilia M., Mercaldo, Lucia V., Veneri, Paola Delli, Lancellotti, Laura, Privato, Carlo |
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Zdroj: | In Energy Procedia August 2010 2(1):159-164 |
Databáze: | ScienceDirect |
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