Annealing effects on PECVD-grown Si rich [formula omitted] thin films

Autor: Esposito, Emilia M., Mercaldo, Lucia V., Veneri, Paola Delli, Lancellotti, Laura, Privato, Carlo
Zdroj: In Energy Procedia August 2010 2(1):159-164
Databáze: ScienceDirect