Amorphous InZnSnO thin-film-transistors performance enhancement with low-energy Xenon Pulsed-light annealing

Autor: Fan, Ching-Lin, Chen, Yan-Quan, Yu, Xiang-Wei, Tsai, Yung-Sheng
Zdroj: In Materials Science in Semiconductor Processing January 2025 185
Databáze: ScienceDirect