Amorphous InZnSnO thin-film-transistors performance enhancement with low-energy Xenon Pulsed-light annealing
Autor: | Fan, Ching-Lin, Chen, Yan-Quan, Yu, Xiang-Wei, Tsai, Yung-Sheng |
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Zdroj: | In Materials Science in Semiconductor Processing January 2025 185 |
Databáze: | ScienceDirect |
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