Autor:	Belanche, Manuel, Yonezawa, Yoshiyuki, Heller, René, Müller, Arnold, Vockenhuber, Christof, Martinella, Corinna, Rüb, Michael, Kato, Masashi, Murata, Koichi, Tsuchida, Hidekazu, Nakayama, Koji, Grossner, Ulrike
Zdroj:	In Materials Science in Semiconductor Processing 15 August 2024 179
Databáze:	ScienceDirect
Externí odkaz:	Zobrazit plný text záznamu Full Text from ScienceDirect