Defect engineering for improved thermal stability of sulfur hyperdoped silicon
| Autor: | Paulus, Simon, Schäfer, Sören, Mc Kearney, Patrick, Niemeyer, Tobias, Seibt, Michael, Kontermann, Stefan |
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| Zdroj: | In Materials Science in Semiconductor Processing 15 June 2024 176 |
| Databáze: | ScienceDirect |
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